Corange uses the most precise mass flow controller technology, with a combination of Coriolis and Pressure, accurately measure and control the single or mixed gas mass flow and cover the widest range in the semiconductor industry.

​

Key Features:

• Direct Mass Flow Output. As the unique technology from Coriolis, the product can directly measure the mass flow of the fluid regardless of temperature, density, temperature and viscosity change of the fluid. It can measure multiple fluids without changing the device which greatly saves customer's inventory and improves end-users process efficiency. 

• All Metal Seal, High Corrosion Resistance. The lead rate is the top end 1e-10 ATM cc/s. For certain corrosive gas, we provide full Hastelloy C276 wetted material product.

• High Turn Down Ratio

• High Pressure Capabiltiy. The product offer up to 4500psi pressure rating which is significantly higher than any similar semiconductor MFC. 

• High Purity Flow Channel. The wetted surface is significantly smaller than competitor products in the market.